氩气技术指标:
组分/杂质 |
液氩/5.0N |
纯氩/4.0N |
高纯氩/5.0N |
超纯氩/6.0N |
氩气含量 |
99.999% |
99.99% |
99.999% |
99.9999% |
氖Ne |
- |
- |
- |
- |
氢H2 |
≤0.5ppm |
≤5ppm |
≤0.5ppm |
≤0.1ppm |
氧O2 |
≤1.5ppm |
≤10ppm |
≤1.5ppm |
≤0.2ppm |
氮N2 |
≤4ppm |
≤50ppm |
≤4ppm |
≤0.5ppm |
一氧化碳CO |
≤0.3ppm |
≤5ppm |
≤0.3ppm |
≤0.1ppm |
二氧化碳CO2 |
≤0.3ppm |
≤10ppm |
≤0.3ppm |
≤0.1ppm |
总碳(甲烷)THC |
≤0.4ppm |
≤5ppm |
≤0.4ppm |
≤0.1ppm |
水分H2O |
≤3ppm |
≤15ppm |
≤3ppm |
≤0.2ppm |
氩气包装种类
钢瓶种类 |
气体压力 |
气体体积 |
气体净重 |
50L钢瓶 |
19.5±0.5MPa |
10000L |
15.9kg |
40L钢瓶 |
13.5MPa |
5400L |
8.6kg |
杜瓦罐 |
0.8MPa |
130~151Nm3 |
214~250kg |
槽车 |
0.8MPa |
/ |
20吨以上 |
钢瓶接口:QF-2、PX-32外螺纹/内螺纹,螺纹出口G5/8(外径22.911,牙数为14牙/英寸,螺距为1.814毫米,牙高1.162,小径20.587),CGA580 |